CF SECTION
PM carrier driving feedthrough
XXS0030WMR00006
PM carrier driving feedthrough
XXS0030WMR00001
Loadloack chamber carrier driving feedthrough
XXS0030CMR00004
Loadlock chamber carrier driving feedthrough
XXS0030CMR00002
PM carrier driving feedthrough
XXS0030WMR00004
PM carrier driving feedthrough
XXS0030CMR00001
PM carrier driving feedthrough
XXS0030WMR00003
PM carrier driving feedthrough
XXS0030WMR00002
Rotation chamber carrier driving feedthrough
XXS0030WNR00011
Rotation chamber metal frame rotation feedthrough
XXH0100CXR00001
Rotation chamber carrier driving feedthrough
XXS0030WNR00001
PM carrier driving feedthrough
XXS0030CNR00003
PM carrier driving feedthrough
XXS0030WMR00005
Rotation chamber metal frame rotation feedthrough
XXH0145WAR00001
Rotation chamber metal frame rotation feedthrough
XXH0100WXR00001
Rotation chamber metal frame rotation feedthrough
AXR0100WXZ00001