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Loadlock chamber carrier driving feedthrough

XXS0030CMR00002

Loadlock chamber carrier driving feedthrough

    Air-cooled feedthrough

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Detail Specification

General condition(Air-cooled) (>G6)(102266305)

Degree of vacuum pressure (Torr) 10^-7
Tempetature Range ( C) 0~80
Speed (RPM) 0~200
The use of gas Non-reactive

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