Products & Service
Rotation chamber carrier driving feedthrough
Detail Specification
Compact / High temperature condition(
| Degree of vacuum pressure (Torr) | 10^-7 |
| Speed (RPM) | 0~200 |
| The use of gas | 非活性氣體 |
| Water pressure (kg/cm^2) | 5 |
| Temperature Range (C) | 0~80 |