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Rotation chamber carrier driving feedthrough

XXS0030WNR00001

Rotation chamber carrier driving feedthrough

    Water-cooled feedthrough

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Detail Specification

Compact / High temperature condition​(>G6)

Degree of vacuum pressure (Torr) 10^-7
Speed (RPM) 0~200
The use of gas Non-reactive
Water pressure(kg/cm^2) 5
Temperature Range ( C) 0~80

 


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