Detail Specification

• Multi-functional Digital Control Panel
• Programmable Dosage Control 
• On-line System Monitoring：
    - UV Irradiation Intensity Meter
    - UV Lamp Service Life Meter
    - UV Lamp Status LEDs
• Compact, tabletop design.
• Safe, ozone-free UV irradiation source.
• Processes wafers up to 300mm.
• Minimal maintenance.