Detail Specification

• Multi-functional Digital Control  Panel
• Programmable Dosage Control

• On-line System Monitoring:
    - UV Irradiation Intensity Meter
    - UV Lamp Service Life Meter
    - UV Lamp Status LEDs

• Compact, tabletop design

• Safe, ozone-free UV irradiation source

• Processes wafers up to 8”

• Minimal maintenance