Products & Service
VWM-871
VWM-871
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Up to 8" substrates, especially effective for Non-planar, bumped, thin and brittle wafers.
Detail Specification
Semi-Auto Vacuum Wafer
- Effective for bumped or structured wafers/substrates and for thin or brittle wafers.
- No mechanical contact with substrate – eliminates wafer stress during mounting.
- Vacuum mounting environment –eliminates air bubbles.
- Automatic (PLC-controlled) wafer mounting process, manual tape handling.
- Process-controlled tape tensioning.
- Simple-to-use, touch screen operator interface.
- Built-in vacuum generator.