．Stand-alone vapor generator and vapor flow control system.
Vapcab is a modular and highly flexible vapor generator and vapor flow control system. Vapor cabinet Vapcab can be interfaced on any CVD machine, close to the machine or remote.
- one or more patented Vapbox direct liquid injection vaporize: 2 Vapbox 500, 2 Vapbox 300, 1 Vapbox 1500 (with 2 injection heads) or 1 Vapbox 4000 (with 3 or 4 injection heads)
- a carrier gas panel with up to 4 carrier gas lines
- up to 4 liquid flow control kits
- a liquid panel with up to 4 precursor tanks and 1 solvent tank
- a multizone temperature controller
- a PLC (programmable Logic Controller)
- an exhausted cabinet enclosing all the components
- integral hot process and bypass valves for vapor delivery to a bypass line or to the process