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ATOKIT CF100

ATOKIT CF100

    .compact and low cost DLI atomizer
    .operate up to 300°C
    .one Kemstream injection head

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Detail Specification

Atokit CF100 DLI atomizer can be installed on any CVD and ALD machine. It can atomize at up to 300°C one liquid or one solution under vacuum or at atmospheric pressure.

 

General

  • One injection head
  • CF100mm stainless steel flange
  • Liquid inlet: 1/8” compression type fitting
  • Carrier gas inlet: 1/4" female VCR fitting
  • Other fittings are available upon request

Heating

  • One heating zone, up to 300°C, 300 W (230 VAC or 115 VAC)

  • 1 K type thermocouple
  • Current needed: 1.3 A (230 VAC) ; 2.6 A (115 VAC)

Accessories:

  • Liquid panel including a precursor tank and a solvent tank (or only a precursor tank)

  • Liquid flow controlling kit including a Liquid Flow Meter (LFM)

  • Carrier gas panel including a carrier gas Mass Flow Meter (MFM)

  • TCU (Temperature Control Unit): 19” rackable 4U box


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