Detail Specification

Atokit CF100 DLI atomizer can be installed on any CVD and ALD machine. It can atomize at up to 300°C one liquid or one solution under vacuum or at atmospheric pressure.

General

• One injection head
• CF100mm stainless steel flange
• Liquid inlet: 1/8” compression type fitting
• Carrier gas inlet: 1/4" female VCR fitting
• Other fittings are available upon request

Heating

• One heating zone, up to 300°C, 300 W (230 VAC or 115 VAC)

• 1 K type thermocouple
• Current needed: 1.3 A (230 VAC) ; 2.6 A (115 VAC)

Accessories:

• Liquid panel including a precursor tank and a solvent tank (or only a precursor tank)

• Liquid flow controlling kit including a Liquid Flow Meter (LFM)

• Carrier gas panel including a carrier gas Mass Flow Meter (MFM)

• TCU (Temperature Control Unit): 19” rackable 4U box