Detail Specification

Vapbox 4000 DLI can be integrated on any CVD and ALD machine. It can vaporize at up to 250°C four liquids or four solutions sequentially or simultaneously under vacuum or at atmospheric pressure.

General

• One to four injection heads
• Liquid inlet: 1/8” compression type fitting
• Carrier gas inlet: 1/4" female VCR fitting
• Vapor outlet: 1/2" male VCR fitting
• Other fittings are available upon request

Heating

• Six heating zones, up to 250°C, 2600 W (230 VAC or 115 VAC)

• 6 K type thermocouples: (1 per heating zone)
• Current needed: 11.3 A (230 VAC) ; 22.6 A (115 VAC)

Accessories:

• Liquid panel including one to four precursor tanks and a solvent tank (or only one or two precursor tanks)

• 1 to 4 liquid flow controlling kits with a Liquid Flow Meter (LFM) per kit

• Carrier gas panel including a carrier gas line with one Mass Flow Meter (MFM) per injection head

• TCU (Temperature Control Unit): 19” rackable 4U box