Detail Specification

Vapbox 1500 DLI can be integrated on any CVD and ALD machine. It can vaporize at up to 300°C two liquids or two solutions sequentially or simultaneously under vacuum or at atmospheric pressure.

General

• One or two injection heads
• Liquid inlet: 1/8” compression type fitting
• Carrier gas inlet: 1/4" female VCR fitting
• Vapor outlet: 1/2" male VCR fitting
• Other fittings are available upon request

Heating

• Three heating zones, up to 300°C, 1650 W (230 VAC or 115 VAC)

• 3 K type thermocouples: (1 per heating zone)
• Current needed: 7.2 A (230 VAC) ; 14.4 A (115 VAC)

Accessories:

• Liquid panel including one or two precursor tanks and a solvent tank (or only one or two precursor tanks)

• 1 or 2 liquid flow controlling kits with a Liquid Flow Meter (LFM) per kit

• Carrier gas panel including a carrier gas line with one Mass Flow Meter (MFM) per injection head

• TCU (Temperature Control Unit): 19” rackable 4U box