Products

PRODUCT

Products

VAPBOX 1500

VAPBOX 1500

    .operate up to 300°C
    .vaporize two liquids or two solutions sequentially or simultaneously

Enquiry Now!

Detail Specification

Vapbox 1500 DLI can be integrated on any CVD and ALD machine. It can vaporize at up to 300°C two liquids or two solutions sequentially or simultaneously under vacuum or at atmospheric pressure.

 

General

  • One or two injection heads
  • Liquid inlet: 1/8” compression type fitting
  • Carrier gas inlet: 1/4" female VCR fitting
  • Vapor outlet: 1/2" male VCR fitting
  • Other fittings are available upon request

Heating

  • Three heating zones, up to 300°C, 1650 W (230 VAC or 115 VAC)

  • 3 K type thermocouples: (1 per heating zone)
  • Current needed: 7.2 A (230 VAC) ; 14.4 A (115 VAC)

Accessories:

  • Liquid panel including one or two precursor tanks and a solvent tank (or only one or two precursor tanks)

  • 1 or 2 liquid flow controlling kits with a Liquid Flow Meter (LFM) per kit

  • Carrier gas panel including a carrier gas line with one Mass Flow Meter (MFM) per injection head

  • TCU (Temperature Control Unit): 19” rackable 4U box 


Product has been added to Shopping Cart!  

We use cookies to ensure that we give you the best experience on our website. Click here to find out more or to change your cookie settings.