From November 2014, ANTS officially represents ANNEALSYS in Taiwan to promote RTP, CVD and ALD related products.

Annealsys, founded in 2004, designs, manufactures and sells Rapid Thermal Processing (RTP) furnaces and thin film deposition machines using CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes. These machines allow the deposition of new materials for a wide range of applications: semiconductor, microsystems, optoelectronics, solar cells, glass, ceramics, and superconductors.
Annealsys machines are primarily used in research laboratories and universities, and for industrial companies producing small batches.
Annealsys has the Innovative Company Label from BPI France.

Please see following link for futher details:

http://www.ants-inc.com.tw/admin/product_en/front/product_index.php