LC Series
LC 100/102
LC Series
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Specification：
The LC100 is a four-inch tubular compact furnace designed for LPCVD processes. It is dedicated to research and development and small-scale production s. It can process up to 50 wafers per process.
The process chamber is made of a quartz tube with stainless steel flanges. The quartz boats are held by two quartz rods attached to the loading door. The high quality, low thermal mass, heater elements provide fast thermal response.
A high quality digital temperature controller controls the temperature of each heating zone. The controller has auto-tuning capability and continuous parameter adaptation in case of process changes. This temperature control system provides highly accurate and reproducible thermal cycles.
The system is provided with one purge gas line and can receive up to 12 process gas lines with mass flow controllers.
The furnace is available in single tube (LC100) and double tube (LC102) versions.
Detail Specification
spec. table
| Applications | LPCVD, Annealing, Oxidation… |
| Substrate size | up to 4-inch diameter |
| Temperature max. | 1100°C |
| Temperature control | 3 zones, thermocouple, PID control |
| Vacuum capability | 10-3 Torr (option: 10-6 Torr) |
| Gas lines | up to 12 gas lines with MFC, one purge line with needle valve |
| Loading | manual batch (up to 50 wafers per process) |
| Number of process tubes | 1 or 2 |
|
Maximum substrate diameter |
Four inch |
|
Process chamber |
Quartz tube with water-cooled stainless steel flanges |
|
Heating |
Low thermal inertia resistor furnace Maximum temperature 1000°C or 1100°C |
|
Temperature control |
Thermocouple temperature control Digital PID temperature controller – 3 zones |
|
Vacuum and gas |
Purge gas line with needle valve Up to 12 process gas lines with digital mass flow controllers Vacuum valve and vacuum gauge Optional vacuum rotary of dry pump Optional pressure control with throttle valve Option turbo pump |
|
Control |
PC control |
|
Facilities |
Electricity: 3x400V+N+Gr or 3x220V+Gr, 50/60 Hz Power: 15 kW (1 tube) or 30 kW (2 tubes) Water: 2 to 6 bars, pressure drop 1 bar, 8 l/mn Compressed air: 6 bars (valve actuation) Process gas fittings: VCR ¼ |
|
Dimensions and weight |
Width: 700 mm Depth: 1700 mm Height: 1500 mm Weight: 600 kg |