AS-Micro Bench Top

Bench Top / Twin Chamber

AS-Micro Bench Top

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Detail Specification

Three-inch rapid thermal processor with vacuum capability dedicated to research applications

Sample size: few square millimeters up to 3-inch

Optional 3-inch susceptor for 2-inch sample

Quartz tube with stainless steel flanges process chamber

Tubular infrared halogen lamps furnace. Very fast ramp rates (> 250°C/s)

Horizontal motion door with quartz tray for easy loading and unloading of the wafers and thermocouple installation.

Thermocouple temperature measurement and the fast digital PID temperature controller assure high and stable temperature control across the temperature range.

Optional pyrometer control.

Optional twin chamber to manage cross-contamination


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