產品及服務介紹
UV-9200 Automatic
詳細說明
- Fully automatic Cassette-to-Cassette
- PC-controlled with AE custom
- Continuous processing cycle
- Economical Cost-of-Ownership
- Safe, ozone-free UV irradiation
- Processes 5"/6"/8"wafer frame/cassettes.
- Optional: UVA (365 nm) light source is available.