產品及服務介紹
UV-957
UV-957
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Digital Control UV Tape
Curing Systems for 300mm Wafers
Programmable Dosage Control, Up to 12"
詳細說明
- Multi-functional Digital Control Panel
- Programmable Dosage Control
- On-line System Monitoring：
- UV Irradiation Intensity Meter
- UV Lamp Service Life Meter
- UV Lamp Status LEDs - Compact, tabletop design.
- Safe, ozone-free UV irradiation source.
- Processes wafers up to 300mm.
- Minimal maintenance.
- Optional: UVA (365 nm) light source is available.