詳細說明

• PLC controller with convenient LCD display.
• Processes frame-mounted wafers up to 8".
• Atomizer (Bubble) cleaning standard: High-Pressure cleaning  optionmal (in same system).
• Compact system size.
• Purified Nitrogen drying at the end of the process cycle.
• Nitrogen puff wafer release.
• Dicing frame safety lock chuck.