詳細說明

• one or more patented Vapbox direct liquid injection vaporize: 2 Vapbox 500, 2 Vapbox 300, 1 Vapbox 1500 (with 2 injection heads) or 1 Vapbox 4000 (with 3 or 4 injection heads)
• a carrier gas panel with up to 4 carrier gas lines
• up to 4 liquid flow control kits
• a liquid panel with up to 4 precursor tanks and 1 solvent tank
• a multizone temperature controller
• a PLC (programmable Logic Controller)
• an exhausted cabinet enclosing all the components
• integral hot process and bypass valves for vapor delivery to a bypass line or to the process