詳細說明

General

• Compatible with air sensitive precursors
• 1 or 2 precursor tanks
• Pressurization port
• Vacuum port
• Depressurization port
• Vapor outlet: 1/2" male VCR fitting

Versions

• Manual valves or pneumatic valves

• Enclosed in a cabinet or not

Options:

• Low liquid level sensor

• Solvent tank

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

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• Implant annealing
• Contact annealing (III-V and SiC)
• Rapid Thermal Oxidation (RTO)
• Rapid Thermal Nitridation (RTN)
• Selenization (CIGS solar cells)
• Silicon carbonization
• Sol-gel densification and crystallization
• Diffusion from spin-on dopants
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• Simple and multi-metallic oxides
• Metals, nitrides and alloys
• III-V, wide band gap semiconductors
• 2D and 3D materials
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• SiC implant annealing
• CVD of graphene
• Graphene by high temperature SiC sublimation