產品及服務介紹
溫度控制單元
溫度控制單元
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Temperature Control Units (TCU) specially designed for controlling heating of Vapbox DLI vaporizers and Atokit CF100 DLI atomizer. They can control heating of 2, 4 or 6 independent zones.
詳細說明
General
- 19" rackable unit, 4U
- Multiloop PID temperature controller
- Integrated solid state relays
- External emergency stop input
- Alarm output
- PID parameters optimized for optimal temperature control
User interface
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Manual front panel
- RS485 port
Versions:
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2, 4 or 6 heating zones
- 115 VAC or 230 VAC
- Implant annealing
- Contact annealing (III-V and SiC)
- Rapid Thermal Oxidation (RTO)
- Rapid Thermal Nitridation (RTN)
- Selenization (CIGS solar cells)
- Silicon carbonization
- Sol-gel densification and crystallization
- Diffusion from spin-on dopants
- Simple and multi-metallic oxides
- Metals, nitrides and alloys
- III-V, wide band gap semiconductors
- 2D and 3D materials
- SiC implant annealing
- CVD of graphene
- Graphene by high temperature SiC sublimation