產品及服務介紹
ATOKIT CF100
ATOKIT CF100
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Compact and low cost DLI atomizer that can operate up to 300°C. It features one high performance and proprietary Kemstream injection head
詳細說明
General
- One injection head
- CF100mm stainless steel flange
- Liquid inlet: 1/8” compression type fitting
- Carrier gas inlet: 1/4" female VCR fitting
- Other fittings are available upon request
Heating
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One heating zone, up to 300°C, 300 W (230 VAC or 115 VAC)
- 1 K type thermocouple
- Current needed: 1.3 A (230 VAC) ; 2.6 A (115 VAC)
Accessories:
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Liquid panel including a precursor tank and a solvent tank (or only a precursor tank)
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Liquid flow controlling kit including a Liquid Flow Meter (LFM)
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Carrier gas panel including a carrier gas Mass Flow Meter (MFM)
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TCU (Temperature Control Unit): 19” rackable 4U box