產品及服務介紹
VAPBOX 4000
VAPBOX 4000
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High performance and highly versatile DLI vaporizer that can operate up to 250°C. It features four proprietary Kemstream injection heads.
詳細說明
General
- One to four injection heads
- Liquid inlet: 1/8” compression type fitting
- Carrier gas inlet: 1/4" female VCR fitting
- Vapor outlet: 1/2" male VCR fitting
- Other fittings are available upon request
Heating
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Six heating zones, up to 250°C, 2600 W (230 VAC or 115 VAC)
- 6 K type thermocouples: (1 per heating zone)
- Current needed: 11.3 A (230 VAC) ; 22.6 A (115 VAC)
Accessories:
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Liquid panel including one to four precursor tanks and a solvent tank (or only one or two precursor tanks)
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1 to 4 liquid flow controlling kits with a Liquid Flow Meter (LFM) per kit
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Carrier gas panel including a carrier gas line with one Mass Flow Meter (MFM) per injection head
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TCU (Temperature Control Unit): 19” rackable 4U box
- Implant annealing
- Contact annealing (III-V and SiC)
- Rapid Thermal Oxidation (RTO)
- Rapid Thermal Nitridation (RTN)
- Selenization (CIGS solar cells)
- Silicon carbonization
- Sol-gel densification and crystallization
- Diffusion from spin-on dopants
- Simple and multi-metallic oxides
- Metals, nitrides and alloys
- III-V, wide band gap semiconductors
- 2D and 3D materials
- SiC implant annealing
- CVD of graphene
- Graphene by high temperature SiC sublimation