產品及服務介紹

PRODUCTS & SERVICE

產品及服務介紹

VAPBOX 4000

VAPBOX 4000

    High performance and highly versatile DLI vaporizer that can operate up to 250°C. It features four proprietary Kemstream injection heads.

馬上詢價!

詳細說明

General

  • One to four injection heads
  • Liquid inlet: 1/8” compression type fitting
  • Carrier gas inlet: 1/4" female VCR fitting
  • Vapor outlet: 1/2" male VCR fitting
  • Other fittings are available upon request

Heating

  • Six heating zones, up to 250°C, 2600 W (230 VAC or 115 VAC)

  • 6 K type thermocouples: (1 per heating zone)
  • Current needed: 11.3 A (230 VAC) ; 22.6 A (115 VAC)

Accessories:

  • Liquid panel including one to four precursor tanks and a solvent tank (or only one or two precursor tanks)

  • 1 to 4 liquid flow controlling kits with a Liquid Flow Meter (LFM) per kit

  • Carrier gas panel including a carrier gas line with one Mass Flow Meter (MFM) per injection head

  • TCU (Temperature Control Unit): 19” rackable 4U box

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 


  • Implant annealing
  • Contact annealing (III-V and SiC)
  • Rapid Thermal Oxidation (RTO)
  • Rapid Thermal Nitridation (RTN)
  • Selenization (CIGS solar cells)
  • Silicon carbonization
  • Sol-gel densification and crystallization
  • Diffusion from spin-on dopants
  •  
  • Simple and multi-metallic oxides
  • Metals, nitrides and alloys
  • III-V, wide band gap semiconductors
  • 2D and 3D materials
  •  
  • SiC implant annealing
  • CVD of graphene
  • Graphene by high temperature SiC sublimation

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