產品及服務介紹
VAPBOX 300
VAPBOX 300
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Vapbox 300 is the smaller and lower cost DLI vaporizer of Vapbox series. Its reduced size makes its integration easy on any CVD and ALD machine. It can vaporize at up to 250°C one liquid or one solution under vacuum or at atmospheric pressure.
詳細說明
General
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One injection head
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Liquid inlet: 1/8” compression type fitting
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Carrier gas inlet: 1/4" female VCR fitting
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Vapor outlet: 1/2" male VCR fitting
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Other fittings are available upon request
Heating
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One heating zone, up to 250°C, 400 W (230 VAC or 115 VAC)
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2 K type thermocouples: (1 for heating control, 1 for alarm purpose)
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Current needed: 1.85 A (230 VAC) ; 3.7 A (115 VAC)
Accessories:
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Liquid panel including a precursor tank and a solvent tank (or only a precursor tank)
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Liquid flow controlling kit including a Liquid Flow Meter (LFM)
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Carrier gas panel including a carrier gas Mass Flow Meter (MFM)
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TCU (Temperature Control Unit): 19” rackable 4U box
- Implant annealing
- Contact annealing (III-V and SiC)
- Rapid Thermal Oxidation (RTO)
- Rapid Thermal Nitridation (RTN)
- Selenization (CIGS solar cells)
- Silicon carbonization
- Sol-gel densification and crystallization
- Diffusion from spin-on dopants
- Simple and multi-metallic oxides
- Metals, nitrides and alloys
- III-V, wide band gap semiconductors
- 2D and 3D materials
- SiC implant annealing
- CVD of graphene
- Graphene by high temperature SiC sublimation