Maximum substrate diameter

2-inch (51 mm)

Process chamber

Quartz tube with water-cooled stainless steel flanges

Heating

Halogen lamps

Temperature control

Thermocouple temperature control

Optional pyrometer temperature control

Digital PID temperature controllers

Vacuum, gas and liquid

Up to 8 process gas lines with mass flow controllers

Up to 6 vaporizer units selected function of liquid precursors

Additional ALD kit for water

Automated liquid panel for easy precursor handling

Vacuum valve, vacuum gauge and purge gas line

By-pass vacuum valve

Pressure control with throttle valve

Optional vacuum rotary pump

Optional turbo pump

Control

Full PC control

Facilities

Electricity: 3x400V+N+Gr or 3x220V+Gr, 50/60 Hz

Power: 20 kW

Water: 2 to 6 bars, pressure drop 1 bar, 8 l/mn

Compressed air: 6 bars (valve actuation)

Process gas fittings: Swagelok ¼ (Optional VCR)

Dimensions and weight

Width: 955 mm

Depth: 1604 mm

Height: 1812 mm

Weight: 400 kg