應用實績

APPLICATION

應用實績

AMAT Sputtering Equipment

AMAT Sputtering Equipment_New Aristo

  • 特性:
  • ANTS Magnetic Feedthroughs successfully introduced into AMAT New Aristo (NAR) Equipment for Color Filter sector in TFT-LCD and LTPS driven LCD manufacturing lines. In order to transport glass substrate carrier in vacuum environment, ANTS Magnetic Feedthrough plays an crucial role with respect to not only throughput and also process stability to contribute customers' line capacity and process integration optimization.

詳細說明


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