應用實績

APPLICATION

應用實績

AMAT Sputtering Equipment

AMAT Sputtering Equipment_PiVot

  • 特性:
  • ANTS Magnetic Feedthroughs successfully introduced into AMAT PiVot Equipment for Array sector in TFT-LCD and LTPS driven LCD manufacturing lines. In order to transport glass substrate carrier in vacuum environment, ANTS Magnetic Feedthrough plays an crucial role with respect to not only throughput and also process stability to contribute customers' line capacity and process integration optimization.

詳細說明


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