應用實績
AMAT Sputtering Equipment
AMAT Sputtering Equipment_PiVot
ANTS Magnetic Feedthroughs successfully introduced into AMAT PiVot Equipment for Array sector in TFT-LCD and LTPS driven LCD manufacturing lines. In order to transport glass substrate carrier in vacuum environment, ANTS Magnetic Feedthrough plays an crucial role with respect to not only throughput and also process stability to contribute customers' line capacity and process integration optimization.
詳細說明